A.D.P. Ltd
Multiphysics Simulation for MEMS.
Audience
This course is aimed at practising engineers and researchers in the Micro Electro Mechanical Systems (MEMS) industries who wish perform coupled field analyses as applicable to common MEMS devices.
Recommended background knowledge
- Engineering degree or engineering experience.
- Familiarity with the ANSYS program,
ie Introduction to ANSYS for MEMS training course or equivalent experience.
Topics Covered
- Electrostatics
- Capacitance extraction
- Piezoelectrics
- Pre-stress effects
- Initial stress effects
- Damping characterization via CFD simulation
- Thermal-electric coupled simulation
- Coupled electrostatic-structural dynamic simulation including harmonic and transient analysis
- Substructuring
- Reduced order modeling using coupled transducer elements
- Pull-in and hysteresis simulation
Objectives
Understand how ANSYS can be used to analyse MEMS devices such as thermal-electric actuators, comb drive resonators, micromirrors, switches and piezoelectric actuators
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